Francis F. Chen

Francis F. Chen

PROFESSOR EMERITUS
ELECTRICAL AND COMPUTER ENGINEERING

6532D Boelter Hall

Email:
Phone: (310) 825-5624

Websites

RESEARCH AND INTERESTS
Radiofrequency plasma sources for industrial applications. He invented the “helicon” source with permanent magnets, applied to semiconductor etching and spacecraft propulsion. Heads Low Temperature Plasma Technology Laboratory (LTPTL)