Francis Chen
PROFESSOR EMERITUS
ELECTRICAL AND COMPUTER ENGINEERING
6532D Boelter Hall
Email: ffchen@ee.ucla.eduPhone: (310) 825-5624
Websites
RESEARCH AND INTERESTS
Radiofrequency plasma sources for industrial applications. He invented the “helicon” source with permanent magnets, applied to semiconductor etching and spacecraft propulsion. Heads Low Temperature Plasma Technology Laboratory (LTPTL)