Electrical and Computer Engineering
Francis Chen
Professor Emeritus
- 6532D Boelter Hall
- ffchen@ee.ucla.edu
- (310) 825-5624
Faculty Information
Research and Interests
Radiofrequency plasma sources for industrial applications. He invented the “helicon” source with permanent magnets, applied to semiconductor etching and spacecraft propulsion. Heads Low Temperature Plasma Technology Laboratory (LTPTL)