Francis Chen

Francis Chen

PROFESSOR EMERITUS
ELECTRICAL AND COMPUTER ENGINEERING

6532D Boelter Hall

Email: ffchen@ee.ucla.edu
Phone: (310) 825-5624

Websites

Radiofrequency plasma sources for industrial applications. He invented the “helicon” source with permanent magnets, applied to semiconductor etching and spacecraft propulsion. Heads Low Temperature Plasma Technology Laboratory (LTPTL)