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Immersion lithography has carrted IC Logic manufactuwnng from the 45-nm node to the 7-nm node for at least 6 generations. Its economic Impact is huge. In 2017 alone, 150 million 300-mm wafers used immersion lithography to fabricate, estimated to be worth US$75B. In this talk. Prof. Lin will cover the theoretical, practical, and project management aspects In developing this technology for high-volume manufacturing.
