Address
1001 Rose Bowl Drive
Pasadena
CA
United States
Upcoming Events
<li>No events in this location</li>
Events Calendar
Mon
Tue
Wed
Thu
Fri
Sat
Sun
M
T
W
T
F
S
S
31
1
2
3
4
5
6
7
8
9
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
1
2
3
Immersion lithography has carrted IC Logic manufactuwnng from the 45-nm node to the 7-nm node for at least 6 generations. Its economic Impact is huge. In 2017 alone, 150 million 300-mm wafers used immersion lithography to fabricate, estimated to be worth US$75B. In this talk. Prof. Lin will cover the theoretical, practical, and project management aspects In developing this technology for high-volume manufacturing.
